Precision Product-Process Design and Optimization by Sanjay S. Pande & Uday S. Dixit

Author:Sanjay S. Pande & Uday S. Dixit
Language: eng
Format: epub
Publisher: Springer Singapore, Singapore

(5)

where σ is the standard deviation of the beam. The total depth being machined due to FIB milling can be written as

(6)

where M is the number of pixels to be machined, z i is the machined depth at ith pixel, Y s is the erosion rate and t j is the dwell time (which is decision variable) at jth pixel. The above equation can be written as

(7)

where N is the total number of pixels on substrate, a ij is the milling coefficient and A is an N × M matrix to measure the milling coefficients.

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